INVAP
has designed and built several custom-made Ultra
High Vacuum Chambers for scientific use. The following
description corresponds to a one of them designed and constructed
for pulsed laser ablation deposition, its customer being
North Carolina State University, USA. |
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This particular chamber helped North Carolina State
researchers to grow high temperature ferroelectric thin films,
and the result of their investigation was a breaktrough type film
extensively employed in the first “smart cards”, commercial
products based on ferroelectric memories.
The above said chamber is built in AISI 304 steel,
40-cm in diameter and 60-cm in height, with 15 Conflat-like flanges,
some of them welded pointing to a common centre.
All the TIG welds were performed from the internal
part of the chamber emphasizing the cleanliness of the surfaces
during the whole process. The surfaces were finally electrochemically
polished reaching a precision better than 0.05 microns.
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